Semiconductor parts processing

Semiconductor component processing is a key component of semiconductor equipment. According to incomplete statistics, there is currently no standard for the classification of semiconductor components in the industry. There are mainly the following classification methods.
According to the internal process of typical integrated circuit equipment cavities, components can be divided into five categories: power and RF control, gas conveying, vacuum control, temperature control, and conveying devices. The power and RF control categories include RF generators and matchers, DC/AC power supplies, etc. Gas transportation mainly includes flow controllers, pneumatic components, gas filters, etc. The vacuum control category includes various vacuum pumps such as dry pumps/cold pumps/molecular pumps, control valves/pendulum valves, pressure gauges, and O-Ring sealing rings. The temperature control category includes heating discs/electrostatic suction cups, heat exchangers, and lifting components. Transport devices include robotic arms, EFEM, bearings, precision tracks, stepper motors, etc.
According to the main materials and functions of semiconductor components, they can be divided into twelve categories, including silicon/silicon carbide components, quartz components, ceramic components, metal components, graphite components, plastic components, vacuum components, seals, filtering components, moving components, electronic control components, and other components. Each major category of components also includes several sub products, such as vacuum gauges (measuring process vacuum), vacuum pressure gauges, gas flow meters (MFC), vacuum valves, vacuum pumps, and other key components.
According to the service targets of semiconductor components, semiconductor core components can be divided into two types, namely precision machined parts and general purchased parts. Precision machining parts are usually designed by engineers from various semiconductor equipment companies themselves, and then outsourced for processing. They are only used on their own equipment, such as process chambers, transmission chambers, etc. Localization is relatively easy, and generally requires high requirements for surface treatment, precision machining and other process technologies; Universal purchased parts are some commonly used components that have been validated for a long time and widely recognized by many equipment and manufacturing plants. They are more standardized and will be used by different equipment companies. They are also used as spare parts and consumables on production lines, such as silicon structural components, O-Ring seals, valves, gauges, pumps, face plates, gas spray head Shower heads, etc. Due to their strong universality and consistency, and the need for certification on equipment and manufacturing production lines, localization is difficult.